- The system is equipped with both a flood gun for charge compensation and an ion gun for controlled etching of surface layers while it is also capable of Ar+ cluster etch which allows for the removal of surface contaminants without damaging the surface.
- Two X-ray sources are available, one is the standard monochromatic Al-Kα source and the other one is an Ag-Lα which has greater ionization energy allowing inner core orbital excitations.
- UV photoelectron spectroscopy (UPS) allows valence band measurements of all sample types and evaluation of the work function for conducting samples.
- Ion Scattering Spectroscopy (ISS) is also available, allowing inspection of the topmost atomic layer composition of samples.
- Reflected electron energy loss spectroscopy (REELS) can allow measurement of electronic structure and the band gap surface plasmon phenomena and detection of hydrogen.
- A heating stage allows measurements to be performed in-situ in a temperature range from LN2 up to 700o
X-ray photoelectron spectroscopy- (XPS) ESCALAB Xi+ Thermo-Fisher Scientific
The ESCALAB Xi+ is a multi-technique instrument that provides elemental and chemical information about the surface region of nearly any solid material.
In this system, high-speed routine XPS analysis of both large and small areas is optimized in the range of 200-900µm, and lateral resolution can be extended to 50µm using a second iris.
The ESCALAB Xi+ provides the user with the most advanced parallel X-ray Photoelectron Imaging (XPI) capabilities for the analysis of small features at a spatial resolution of 50µm.
The X-ray source, pumping system, data acquisition system and sample movement are all fully computer-controlled, providing the user with an unattended operation for the analysis of large numbers of samples. An additional analytical capability is Angle-Resolved XPS (ARXPS) with the programmed sample tilt. In addition, a variety of sample holders allow for large samples, spinning of samples, and two specialized heating stages up to 700oC.
Location: Building No. 51, Room No. 017
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