System:
- Source:
- X-CFEG: Ultra-high-brightness cold field emission gun with energy resolution of < 0.4 eV.
- Flexible high-tension range from 30 – 200 kV.
- Optical column and corrector:
- Three lens condenser illumination system
- S-CORR probe corrector provides sub-Angstrom imaging resolution at 60 kV as specification and an order of magnitude improvement in optical stability. The S-CORR corrects A5 for all accelerating voltages.
- Symmetric S-TWIN objective lens with widegap pole piece design of 5.4 mm allows double tilt of ± 30° in alfa and beta.
- Resolution:
- Information limit: 110 pm
- STEM resolution: 60 pm @ 200 kV and 136 pm @ 60 kV
- EDS – Super-X detector:
- High-sensitivity, windowless EDS, 4 symmetrical segment detector system based on SDD technology.
- Energy resolution: ≤ 136 eV for Mn-Kα.
Available techniques:
- TEM imaging with Ceta-M 16M CMOS camera (with speed enhancement) designed for imaging and diffraction applications.
- STEM imaging with Bright field (BF), Dark field (DF) and/or High Angle Annular Dark Field (HAADF) detectors.
- TEM tomography.
- STEM and EDS tomography.
- iDPC mode (for light elements).
- Precession diffraction with NanoMegas hardware and software package.
Available acceleration voltages:
- 200 kV
- 60 kV
Available holders:
- Single tilt holder
- Double tilt low background analytical holder (optimized for EDS analysis)
- Double tilt hex-lock analytical holder (for magnetic samples)
- Tomography analytical holder (± 70°)
- NanoEx™–i/v – single tilt TEM holder for heating and biasing