Wavelength range: 280 nm to 850 nm
Wavelength resolution: ~ 1 nm
Angle of incidence: ~ 55 deg to ~ 70 deg
Spectroscopic Ellipsometer Sentech SE800
The Sentech SE800 Spectroscopic Ellipsometer is using a Xe-white light source and a diffraction grating with an array of photodiodes to capture data for many wavelengths simultaneously. It can measure at multiple angles of incidence, mapping sample stage and optional microspot optics.
Measurements are made in air under ambient conditions.
Location: Building No. 51, Room No. 004
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