– Resolution 0.7 nm @ 1 keV, 0.6 nm @ 2-30 keV
– Automatic LoadLock
– CCD IR inspection camera
– Beam deceleration
– Integrated Plasma cleaner
– Oil-free pumping system
– Electron detectors;
-ETD (Everhardt Thornley Detector)
-TLD (Through the Lens Detector)
-MD (Mirror Detector) mounted inside the objective lens; compositional and topographic contrast
-ICD (in-Column Detector) 10 cm above the MD in the column; reduced topographical but highlights compositional contrast
-BSD (Back Scatter Detector) retractable, inserted below the pole piece with 4 different concentric segments
-STEM (Scanning Transmission Electron Microscopy detector) retractable, BF DF HAADF (High Angle Angular Dark Field)
– Energy Dispersive Spectroscopy (EDS) Oxford Xmax 80 mm^2 127eV Silicon Drift Detector
– Electron Backscatter Diffraction (EBSD) detector
HRSEM- Verios 460L
The Thermo Fisher Verios 460L field-emission scanning electron microscope (FESEM) offers sub-nanometer resolution over a wide energy range 0.5-30 keV with excellent materials contrast. Its extraordinary low-voltage performance provides extremely precise, surface-specific information even on insulating samples with no conductive coating. The microscope is equipped with a wide array of imaging and analytical detectors for structural and compositional analysis. Verios 460L SEM at the IKI is equipped with an automatic sample loader, and with EDS, EBSD (Oxford Instruments) and STEM detectors.
Location: Building No. 51, Room No. 018
Contact Us
